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论文库 |
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| 论文编号: |
2015-2038 |
| 作者: |
Wang, Qiang(1,2); Wang, Weimin(1,2); Qiu, Chuankai(1); Yu, Junsheng(2) |
| 刊物名称: |
Qiangjiguang Yu Lizishu/High Power Laser and Particle Beams |
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| 论文题目英文: |
An electrostatically actuated MEMS tilting mirror based on self-assembly |
| 年: |
2015 |
| 卷: |
27 |
| 期: |
2 |
| 页: |
024127 |
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