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论文库 |
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| 论文编号: |
2015-2006 |
| 作者: |
Gao, Ping; Yao, Na; Wang, Changtao; Zhao, Zeyu; Luo, Yunfei; Wang, Yanqin; Gao, Guohan; Liu, Kaipeng; Zhao, Chengwei; Luo, Xiangang |
| 刊物名称: |
APPLIED PHYSICS LETTERS |
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| 论文题目英文: |
Enhancing aspect profile of half-pitch 32 nm and 22 nm lithography with plasmonic cavity lens |
| 年: |
2015 |
| 卷: |
106 |
| 期: |
9 |
| 页: |
93110 |
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