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论文库 |
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| 论文编号: |
2014-2169 |
| 作者: |
Zhu, Hongwei(1); Xing, Tingwen(1); Chen, Zexiang(2) |
| 刊物名称: |
Proceedings of SPIE: Optical System Alignment, Tolerancing, and Verification VIII |
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| 论文题目英文: |
Dynamic compensation for the lithographic object lens |
| 年: |
2014 |
| 卷: |
9195 |
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| 页: |
91950P |
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