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论文库 |
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| 论文编号: |
2014-2168 |
| 作者: |
Liu, Zhixiang(1,2,3); Xing, Tingwen(1); Jiang, Yadong(2); Lv, Baobin(1,2,3); Xu, Fuchao(1) |
| 刊物名称: |
Proceedings of SPIE: Optical Design and Testing VI |
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| 论文题目英文: |
Two-dimension lateral shearing interferometry for microscope objective wavefront metrology |
| 年: |
2014 |
| 卷: |
9272 |
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| 页: |
92721B |
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