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论文库 |
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| 论文编号: |
2014-2082 |
| 作者: |
Zhang, Yukun(1,2,3); Du, Jinglei(1); Yin, Shaoyun(2); Gao, Hongtao(3); Xia, Liangping(2); Shi, Lifang(3); Du, Chunlei(2); Zhang, Zhiyou(1) |
| 刊物名称: |
Optik |
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| 论文题目英文: |
Nanolithography method with controllable critical dimension based on evanescent waves coupling |
| 年: |
2014 |
| 卷: |
125 |
| 期: |
13 |
| 页: |
3201-3203 |
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