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论文库 |
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| 论文编号: |
2014-2077 |
| 作者: |
Di, Chengliang(1,2); Zhu, Jiangping(1,2,3); Yan, Wei(1); Hu, Song(1) |
| 刊物名称: |
Optik |
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| 论文题目英文: |
A modified alignment method based on four-quadrant-grating moiré for proximity lithography |
| 年: |
2014 |
| 卷: |
125 |
| 期: |
17 |
| 页: |
4868-4872 |
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