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论文库 |
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| 论文编号: |
2014-2055 |
| 作者: |
Zhu, Jiangping(1,2,3); Hu, Song(1); Zhou, Pei(1,3); Yu, Junsheng(2) |
| 刊物名称: |
Optics and Lasers in Engineering |
| 所属学科: |
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| 论文题目英文: |
Experimental study of Talbot imaging moiré-based lithography alignment method |
| 年: |
2014 |
| 卷: |
58 |
| 期: |
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| 页: |
54-59 |
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