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论文库 |
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| 论文编号: |
2014-2047 |
| 作者: |
Wang, Jia(1,2); Fan, Bin(1); Wan, Yongjian(1,3); Shi, Chunyan(1); Zhuo, Bin(1) |
| 刊物名称: |
Optical Engineering |
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| 论文题目英文: |
Method to calculate the error correction ability of tool influence function in certain polishing conditions |
| 年: |
2014 |
| 卷: |
53 |
| 期: |
7 |
| 页: |
075106 |
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