 |
论文库 |
|
|
|
|
| 论文编号: |
2014-2028 |
| 作者: |
Di, Chengliang(1,2); Yan, Wei(1); Hu, Song(1); Li, Yanli(1); Yin, Didi(2); Tang, Yan(1); Tong, Junmin(3) |
| 刊物名称: |
IEEE Photonics Journal |
| 所属学科: |
|
| 论文题目英文: |
A moiré-based four-channel focusing and leveling scheme for projection lithography |
| 年: |
2014 |
| 卷: |
6 |
| 期: |
4 |
| 页: |
6842663 |
| 联系作者: |
|
| 收录类别: |
|
| 影响因子: |
|
| 参与作者: |
|
| 备注: |
|
|
|
|
|
