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论文库 |
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| 论文编号: |
2013-2108 |
| 作者: |
Li, Lan-Lan(1,2); Hu, Song(1); Zhao, Li-Xin(1); Ma, Ping(1) |
| 刊物名称: |
Proceedings of SPIE: International Symposium on Photoelectronic Detection and Imaging 2013: Micro/Nano Optical Imaging Technologies and Applications |
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| 论文题目英文: |
Iterative learning control for synchronization of reticle stage and wafer stage in step-and-scan lithographic equipment |
| 年: |
2013 |
| 卷: |
8911 |
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| 页: |
89110X |
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