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论文库 |
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| 论文编号: |
2013-2107 |
| 作者: |
Jiang, Hai-Bo(1,2); Xing, Ting-Wen(1); Du, Meng(1,2); Chen, An(1,2) |
| 刊物名称: |
Proceedings of SPIE: International Symposium on Photoelectronic Detection and Imaging 2013: Micro/Nano Optical Imaging Technologies and Applications |
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| 论文题目英文: |
Illumination optimization in optical projective lithography |
| 年: |
2013 |
| 卷: |
8911 |
| 期: |
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| 页: |
89110R |
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