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论文库 |
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| 论文编号: |
2013-2102 |
| 作者: |
Zhu, Jiangping(1,2,3); Hu, Song(1); Yu, JunshenG.(2); Zhou, Shaolin(5); Tang, Yan(1); Zhong, Min(4); Zhao, Lixin(1); Chen, Minyong(1); Li, Lanlan(1,3); He, Yu(1,3); Jiang, Wei(1) |
| 刊物名称: |
Optics Express |
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| 论文题目英文: |
Four-quadrant gratings moiré fringe alignment measurement in proximity lithography |
| 年: |
2013 |
| 卷: |
21 |
| 期: |
3 |
| 页: |
3463-3473 |
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