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论文库 |
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| 论文编号: |
2013-2088 |
| 作者: |
Wang, Weimin(1,2,3); Tao, Fenggang(1); Wang, Qiang(1); Qiu, Chuankai(1); Chen, Zexiang(2); Yao, Jun(1) |
| 刊物名称: |
Proceedings of SPIE: MEMS Adaptive Optics VII |
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| 论文题目英文: |
A 19 element segmented MEMS deformable mirror based on electrostatic repulsive-force actuator |
| 年: |
2013 |
| 卷: |
8617 |
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| 页: |
861702 |
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