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论文库 |
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| 论文编号: |
2013-2059 |
| 作者: |
Song, Weihong(1,2); Hou, Xi(1); Wu, Fan(1); Zhao, Wenchuan(1) |
| 刊物名称: |
Proceedings of SPIE: Modeling Aspects in Optical Metrology IV, 2014 |
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| 论文题目英文: |
Comparative analysis of absolute methods to test rotationally asymmetric surface deviation |
| 年: |
2013 |
| 卷: |
8789 |
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| 页: |
87890Z |
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