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论文库 |
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| 论文编号: |
2013-2030 |
| 作者: |
Zhu, Jiangping(1,2,3); Hu, Song(1); Yu, Junsheng(2); Tang, Yan(1); Xu, Feng(5); He, Yu(1,3); Zhou, Shaolin(4); Li, Lanlan(1,3) |
| 刊物名称: |
Optics and Lasers in Engineering |
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| 论文题目英文: |
Influence of tilt moiré fringe on alignment accuracy in proximity lithography |
| 年: |
2013 |
| 卷: |
51 |
| 期: |
4 |
| 页: |
371-381 |
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