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论文库 |
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| 论文编号: |
2013-2027 |
| 作者: |
Li, Lanlan(1,2); Hu, Song(1); Zhao, Lixin(1); Ma, Ping(1); Li, Jinlong(1,2); Zhong, Lingna(1,2) |
| 刊物名称: |
Optik |
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| 论文题目英文: |
A new synchronization control method of wafer and reticle stage in step and scan lithographic equipment |
| 年: |
2013 |
| 卷: |
124 |
| 期: |
24 |
| 页: |
6861-6865 |
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