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| 论文编号: |
2013-2023 |
| 作者: |
Wang, Nan(1,2); Jiang, Wei(1,3); Yan, Wei(1); Hu, Song(1) |
| 刊物名称: |
Proceedings of SPIE: International Symposium on Photoelectronic Detection and Imaging 2013: Micro/Nano Optical Imaging Technologies and Applications |
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| 论文题目英文: |
An algorithm for restoring the wafer surface based on B-spline surface reconstruction |
| 年: |
2013 |
| 卷: |
8911 |
| 期: |
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| 页: |
89110G |
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