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论文库 |
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| 论文编号: |
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| 作者: |
Chao Deng,？Jie Feng,？Tingwen Xing |
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Proc. SPIE,8418,84180V (October 15, 2012); doi: 10.1117/12.975793 |
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| 论文题目英文: |
Research on method of measuring pattern distortion of circularly symmetrical phase etched CGHs and eliminating the effect of pattern distortion |
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2012 |
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