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| 论文编号: |
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| 作者: |
Wang, Weimin (State Key Laboratory of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, Sichuan 610209, China); Tao, Fenggang; Zhang, Jianfei; Yao, Jun |
| 刊物名称: |
Key Engineering Materials, v 503, p 169-173, 2012, Micro-Nano Technology XIII |
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| 论文题目英文: |
A 19 element hexagonal actuator arrangement continuous face-sheet MEMS deformable mirror |
| 年: |
2012 |
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