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| 论文编号: |
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| 作者: |
Zhang, Heng (State Key of Optic Technologies for Micro Fabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, 610209, China); Yao, Jun; Tao, Fenggang; Zhuang, Xuye |
| 刊物名称: |
Key Engineering Materials, v 503, p 49-54, 2012, Micro-Nano Technology XIII |
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| 论文题目英文: |
MEMS grating with interdigitated-comb structure |
| 年: |
2012 |
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