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| 论文编号: |
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| 作者: |
Qiuping Huang, Bincheng Li, Weidong Gao |
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International Journal of Thermophysics, November 2012, Volume 33, Issue 10-11, pp 2082-2088 |
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| 论文题目英文: |
Characterization of Arsenic Ultra-Shallow Junctions in Silicon Using Photocarrier Radiometry and Spectroscopic Ellipsometry |
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2012 |
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