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| 论文编号: |
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| 作者: |
Qi Liu, Ping Ma, Song Hu, Lanlan Li, Jiangping Zhu, Zhuang Sheng |
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Proc. SPIE. 8418,84180X (October 15, 2012) doi: 10.1117/12.971471 |
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| 论文题目英文: |
Study on control strategy for coarse/fine dual-stage of step and scan lithography |
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2012 |
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