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论文库 |
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| 论文编号: |
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| 作者: |
Xu, Feng (Institute Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China); Hu, Song; Yang, Yong; Li, Jinlong; Li, Lanlan |
| 刊物名称: |
Optik, 2012 |
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| 论文题目英文: |
Single closed fringe pattern phase demodulation in alignment of nanolithography |
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2012 |
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